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Journal Articles Sensors and Actuators A: Physical Year : 2013

Development of low frequency, insulating thick diaphragms for power MEMS applications

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Electric power
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Dates and versions

hal-01322282 , version 1 (26-05-2016)

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  • HAL Id : hal-01322282 , version 1

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Fabien Formosa, Adrien Badel, Hugues Favreliere. Development of low frequency, insulating thick diaphragms for power MEMS applications. Sensors and Actuators A: Physical , 2013, 189, pp.370--379. ⟨hal-01322282⟩
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