Development of low frequency, insulating thick diaphragms for power MEMS applications

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http://hal.univ-smb.fr/hal-01322282
Contributor : Adrien Badel <>
Submitted on : Thursday, May 26, 2016 - 6:49:27 PM
Last modification on : Friday, June 21, 2019 - 10:42:11 AM

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Fabien Formosa, Adrien Badel, Hugues Favreliere. Development of low frequency, insulating thick diaphragms for power MEMS applications. Sensors and Actuators A: Physical , Elsevier, 2013, 189, pp.370--379. ⟨hal-01322282⟩

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