Microfabrication of hybrid fluid membrane for microengines

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Conference papers
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http://hal.univ-smb.fr/hal-01322272
Contributor : Adrien Badel <>
Submitted on : Thursday, May 26, 2016 - 6:49:16 PM
Last modification on : Thursday, February 21, 2019 - 5:30:17 PM

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  • HAL Id : hal-01322272, version 1

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Adrien Badel, François Lanzetta, Ravinder Chutani, Fabien Formosa, Michel de Labachelerie. Microfabrication of hybrid fluid membrane for microengines. PowerMEMS, 2015, Boston, CA, 1-4 December 2015, Unknown Region. pp.012048. ⟨hal-01322272⟩

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